Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455429 | Method of producing large-area membrane masks | Jörg Butschke, Florian Letzkus, Elisabeth Penteker, Reinhard Springer, Bernd Hofflinger | 2002-09-24 |
| 6419752 | Structuring device for processing a substrate | Igor Shvets, Ivajlo Rangelow, Peter Güthner, Jens Voight, Guido Mariotto | 2002-07-16 |