Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6348238 | Thin film fabrication method and thin film fabrication apparatus | Shigeru Mizuno, Makoto Satou, Manabu Tagami | 2002-02-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6348238 | Thin film fabrication method and thin film fabrication apparatus | Shigeru Mizuno, Makoto Satou, Manabu Tagami | 2002-02-19 |