Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489621 | Particle beam system with a device for reducing the energy width of a particle beam | — | 2002-12-03 |
| 6459283 | Method and system for testing an electrical component | Reinhold Schmitt | 2002-10-01 |
| 6429427 | Method and apparatus for surface imaging | — | 2002-08-06 |
| 6407387 | Particle beam apparatus | Stefan Lanio | 2002-06-18 |
| 6407388 | Corpuscular beam device | — | 2002-06-18 |