Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6415431 | Repair of phase shift materials to enhance adhesion | — | 2002-07-02 |
| 6346352 | Quartz defect removal utilizing gallium staining and femtosecond ablation | Dennis M. Hayden, John N. Ross | 2002-02-12 |
| 6338409 | Reticle SMIF pod in situ orientation | — | 2002-01-15 |