Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441396 | In-line electrical monitor for measuring mechanical stress at the device level on a semiconductor wafer | Edward D. Adams, Arne Ballantine, Alain Loiseau, James A. Slinkman | 2002-08-27 |