Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6467120 | Wafer cleaning brush profile modification | Uldis A. Ziemins, Jose M. Ocasio, David A. Goodwin | 2002-10-22 |
| 6343974 | Real-time method for profiling and conditioning chemical-mechanical polishing pads | Daniel L. Franca, Jose M. Ocasio, Uldis A. Ziemins | 2002-02-05 |
| 6334230 | Wafer cleaning apparatus | Marc Mattaroccia, Jose M. Ocasio | 2002-01-01 |