Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403407 | Method of forming fully self-aligned TFT with improved process window | Evan G. Colgan, Hisanori Kinoshita, Hiroaki Kitahara, Frank R. Libsch, Kai Schleupen | 2002-06-11 |
| 6338988 | Method for fabricating self-aligned thin-film transistors to define a drain and source in a single photolithographic step | Frank R. Libsch | 2002-01-15 |