Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6459066 | Transmission line based inductively coupled plasma source with stable impedance | Lawrence J. Overzet | 2002-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6459066 | Transmission line based inductively coupled plasma source with stable impedance | Lawrence J. Overzet | 2002-10-01 |