Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440639 | High-aspect ratio resist development using safe-solvent mixtures of alcohol and water | Robert E. Fontana, Jr., Jordan Asher Katine, Michael J. Rooks, Ching Hwa Tsang, Raman Viswanathan | 2002-08-27 |