Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472662 | Automated method for determining several critical dimension properties from scanning electron microscope by using several tilted beam or sample scans | — | 2002-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472662 | Automated method for determining several critical dimension properties from scanning electron microscope by using several tilted beam or sample scans | — | 2002-10-29 |