Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6365326 | Pattern density tailoring for etching of advanced lithographic mask | Maheswaran Surendra, Douglas E. Benoit | 2002-04-02 |
CB
Cameron Brooks
Lockheed Martin: 1 patents #53 of 335Top 20%
Overall (2002): #245,649 of 266,432Top 95%
1
Patents 2002