Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372573 | Self-aligned trench capacitor capping process for high density DRAM cells | Masami Aoki, Hirofumi Inoue, Max G. Levy, Victor R. Nastasi, Emily E. Fisch +1 more | 2002-04-16 |