Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475068 | Wafer holding plate for wafer grinding apparatus and method for manufacturing the same | Yuji Okuda, Shigeharu Ishikawa, Atsushi Mishima | 2002-11-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475068 | Wafer holding plate for wafer grinding apparatus and method for manufacturing the same | Yuji Okuda, Shigeharu Ishikawa, Atsushi Mishima | 2002-11-05 |