Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491752 | Enhanced n-type silicon material for epitaxial wafer substrate and method of making same | Fritz Kirscht, Peter Wildes, Volker Todt, Nobuo Fukuto, Boris A. Snegirev | 2002-12-10 |