Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6384390 | Apparatus for forming thin film using microwave and method therefor | Sun-Tae Jung, Hyoun-Soo Kim | 2002-05-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6384390 | Apparatus for forming thin film using microwave and method therefor | Sun-Tae Jung, Hyoun-Soo Kim | 2002-05-07 |