Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6438441 | Semiconductor factory automation system and method for resetting process recipe by employing trace file | Bo-Soon Jang, Kil-Yong Noh, Hae-sung Kim, Woo Kyu Lee | 2002-08-20 |