Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465356 | Method for forming fine patterns by thinning developed photoresist patterns using oxygen radicals | Sang Soo Park | 2002-10-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465356 | Method for forming fine patterns by thinning developed photoresist patterns using oxygen radicals | Sang Soo Park | 2002-10-15 |