Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6453992 | Temperature controllable gas distributor | — | 2002-09-24 |
| 6444042 | Gas injection system for chemical vapor deposition device | Seung Yoon Yang, In Jae Park, Jong-Woo Yoon, Tanigawa Eiki | 2002-09-03 |