Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6395434 | Phase shift mask and phase shift mask blank | Hideaki Mitsui, Megumi Takeuchi | 2002-05-28 |
| 6335124 | Phase shift mask and phase shift mask blank | Hideaki Mitsui, Megumi Takeuchi | 2002-01-01 |