Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416685 | Chemical mechanical planarization of low dielectric constant materials | Fan Zhang, Feng Q. Liu | 2002-07-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416685 | Chemical mechanical planarization of low dielectric constant materials | Fan Zhang, Feng Q. Liu | 2002-07-09 |