Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6376386 | Method of etching silicon nitride by a mixture of CH2 F2, CH3F or CHF3 and an inert gas | — | 2002-04-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6376386 | Method of etching silicon nitride by a mixture of CH2 F2, CH3F or CHF3 and an inert gas | — | 2002-04-23 |