KH

Kenji Honma

TL Tokyo Electron Limited: 1 patents #141 of 413Top 35%
Overall (2002): #176,466 of 266,432Top 70%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6464948 Ozone processing apparatus for semiconductor processing system — 2002-10-15