Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6337486 | Electron beam drawing process and electron beam drawing apparatus | Minoru Sasaki, Yuji Tange, Kazuyoshi Oonuki, Hiroyuki Itoh | 2002-01-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6337486 | Electron beam drawing process and electron beam drawing apparatus | Minoru Sasaki, Yuji Tange, Kazuyoshi Oonuki, Hiroyuki Itoh | 2002-01-08 |