Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478977 | Polishing method and apparatus | Shigeo Moriyama, Katsuhiko Yamaguchi, Sunao Matsubara, Yoshihiro Ishida, Ryousei Kawa-ai | 2002-11-12 |
| 6458674 | Process for manufacturing semiconductor integrated circuit device | Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more | 2002-10-01 |
| 6376345 | Process for manufacturing semiconductor integrated circuit device | Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more | 2002-04-23 |