Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468700 | Transfer mask blanks and transfer masks exhibiting reduced distortion, and methods for making same | — | 2002-10-22 |
| 6355385 | Methods for making reticle blanks, and for making reticles therefrom, for charged-particle-beam microlithography | — | 2002-03-12 |
| D453165 | Facsimile machine | Akira Haranaka | 2002-01-29 |