Issued Patents 2002
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499229 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-12-31 |
| 6490810 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-12-10 |
| 6487791 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-12-03 |
| 6487794 | Substrate changing-over mechanism in vacuum tank | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-12-03 |
| 6487793 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-12-03 |
| 6484414 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-11-26 |
| 6484415 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-11-26 |
| 6473989 | Conveying system for a vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-11-05 |
| 6470596 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-10-29 |
| 6467187 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-10-22 |
| 6467186 | Transferring device for a vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-10-22 |
| 6463678 | Substrate changing-over mechanism in a vaccum tank | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-10-15 |
| 6463676 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-10-15 |
| 6460270 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-10-08 |
| 6457253 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-10-01 |
| 6446353 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-09-10 |
| D453402 | Vacuum processing equipment configuration | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2002-02-05 |