Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501080 | Ion implanting apparatus and sample processing apparatus | Hiroyuki Tomita | 2002-12-31 |
| 6429442 | Ion implanter | Hiroyuki Tomita | 2002-08-06 |
| 6403969 | Ion implantation system and ion implantation method | Hiroyuki Tomita | 2002-06-11 |
| 6362490 | Ion implanter | Hiroyuki Tomita | 2002-03-26 |