Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6367411 | Plasma CVD apparatus | Yoichi Ogawa, Tetsuo Mizumura, Akira Yano, Hideo Kusada, Takashi Kubota +1 more | 2002-04-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6367411 | Plasma CVD apparatus | Yoichi Ogawa, Tetsuo Mizumura, Akira Yano, Hideo Kusada, Takashi Kubota +1 more | 2002-04-09 |