Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478931 | Apparatus and method for intra-layer modulation of the material deposition and assist beam and the multilayer structure produced therefrom | Hadyn N. G. Wadley, Xiaowang Zhou | 2002-11-12 |