Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423605 | Method and apparatus for forming ultra-shallow junction for semiconductor device | Michael Shevelev | 2002-07-23 |
| 6424090 | Modification of millimetric wavelength microwave beam power distribution | — | 2002-07-23 |
| 6408649 | Method for the rapid thermal treatment of glass and glass-like materials using microwave radiation | Mykhaylo Shevelev | 2002-06-25 |
| 6368994 | Rapid processing of organic materials using short wavelength microwave radiation | — | 2002-04-09 |