Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482659 | Post-epitaxial thermal oxidation for reducing microsteps on polished semiconductor wafers | Danny Kenny | 2002-11-19 |
| 6389326 | Differential process control method | Danny Kenny | 2002-05-14 |
| 6372521 | Post epitaxial thermal oxidation | Danny Kenny | 2002-04-16 |