Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6459280 | Capacitance devices for film thickness mapping, measurement methods using same | Christopher D. Hahm | 2002-10-01 |
| 6404207 | Scanning capacitance device for film thickness mapping featuring enhanced lateral resolution, measurement methods using same | — | 2002-06-11 |