Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6396160 | Fill strategies in the optical kerf | Kathryn H. Varian, Timothy J. Wiltshire | 2002-05-28 |
| 6368516 | Semiconductor manufacturing methods | Enio Carpi | 2002-04-09 |
| 6363296 | System and method for automated defect inspection of photomasks | — | 2002-03-26 |