Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416589 | Carbon-enhanced fluoride ion cleaning | Don Mark Lipkin, Lyle Timothy Rasch | 2002-07-09 |
| 6410148 | Silicon based substrate with environmental/ thermal barrier layer | Harry E. Eaton, William Allen, Nathan S. Jacobson, Nanottam P. Bansal, Elizabeth J. Opila +5 more | 2002-06-25 |
| 6387456 | Silicon based substrate with environmental/thermal barrier layer | Harry E. Eaton, William Allen, Nathan S. Jacobson, Narottam P. Bansal, Elizabeth J. Opila +5 more | 2002-05-14 |