Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420700 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Kenichi Kawakami | 2002-07-16 |
YO
Yoshihisa Ooaeh
Overall (2002): #85,418 of 266,432Top 35%
1
Patents 2002