Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492091 | Positive photosensitive composition | Kunihiko Kodama | 2002-12-10 |
| 6485883 | Positive photoresist composition | Kunihiko Kodama, Shinichi Kanna | 2002-11-26 |
| 6479209 | Positive photosensitive composition | Kenichiro Sato, Morio Yagihara | 2002-11-12 |
| 6479211 | Positive photoresist composition for far ultraviolet exposure | Kenichiro Sato, Kunihiko Kodama, Hajime Nakao | 2002-11-12 |
| 6420082 | Positive resist fluid and positive resist composition | Kenichiro Sato, Kunihiko Kodama | 2002-07-16 |
| 6416925 | Positive working photosensitive composition | Shiro Tan, Kenichiro Sato | 2002-07-09 |
| 6410204 | Positive photoresist composition | Kunihiko Kodama, Kenichiro Sato | 2002-06-25 |
| 6379860 | Positive photosensitive composition | Toru Fujimori, Yasunori Takata, Shiro Tan | 2002-04-30 |