Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6399269 | Bottom anti-reflective coating material composition for photoresist and method of forming resist pattern using the same | Kazuyoshi Mizutani | 2002-06-04 |
MM
Makoto Momota
Overall (2002): #159,975 of 266,432Top 65%
1
Patents 2002