Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6466046 | Contactor for semiconductor devices, a testing apparatus using such contactor, a testing method using such contactor, and a method of cleaning such contactor | Shigeyuki Maruyama, Futoshi Fukaya | 2002-10-15 |
| 6445200 | Semiconductor element testing carrier using a membrane contactor and a semiconductor element testing method and apparatus using such a carrier | — | 2002-09-03 |