Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497996 | Fine pattern forming method | Shinji Sakaguchi | 2002-12-24 |
| 6437887 | Optical logic device and optical memory device | Yoshihisa Usami, Yoshio Inagaki | 2002-08-20 |
| 6426491 | Micro-aperture probe evaluating apparatus having a display and a collimating optical system | — | 2002-07-30 |
| 6417925 | Surface plasmon sensor for analyzing liquid sample or humid atmosphere | — | 2002-07-09 |
| 6344367 | Method of fabricating a diffraction grating | Toshiaki Fukunaga | 2002-02-05 |
| 6340448 | Surface plasmon sensor | Masami Hatori | 2002-01-22 |
| 6338924 | Photomask for near-field exposure having opening filled with transparent material | Isao Tsuruma | 2002-01-15 |