Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423947 | Thermal processing chamber for heating and cooling wafer-like objects | Jeffrey Womack, Vuong P. Nguyen, Devendra Kumar, Jack S. Kasahara | 2002-07-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423947 | Thermal processing chamber for heating and cooling wafer-like objects | Jeffrey Womack, Vuong P. Nguyen, Devendra Kumar, Jack S. Kasahara | 2002-07-23 |