Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436248 | Thin film disk with barrier layer | Heinz Baur, Ralf Bluethner, Hans Buchberger, Klaus Goedicke, Michael Junghaehnel +3 more | 2002-08-20 |
| 6420863 | Method for monitoring alternating current discharge on a double electrode and apparatus | Falk Milde, Andreas Fickert, Volker Kirchhoff, Matthias Fahland | 2002-07-16 |
| 6340416 | Process and system for operating magnetron discharges | Klaus Goedicke, Michael Junghähnel, Fred Fietzke, Volker Kirchhoff, Jonathan Reschke | 2002-01-22 |