Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494666 | Simplified and enhanced SCARA arm | Kung Chris Wu, John M. Rush | 2002-12-17 |
| 6396072 | Load port door assembly with integrated wafer mapper | Eric Meyhofer, Kenneth A. Hardy, Cyril M. Kindt | 2002-05-28 |