Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448804 | Contactless total charge measurement with corona | Roger L. Verkuil, Gregory S. Horner | 2002-09-10 |
| 6335630 | Contactless method for measuring total charge of an oxide layer on a semiconductor wafer using corona charge | Roger L. Verkuil, Gregory S. Horner | 2002-01-01 |