Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432492 | HF-Plasma coating chamber or PECVD coating chamber, its use and method of plating CDs using the chamber | — | 2002-08-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432492 | HF-Plasma coating chamber or PECVD coating chamber, its use and method of plating CDs using the chamber | — | 2002-08-13 |