Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498832 | Electrode configuration for extreme-UV electrical discharge source | Paul A. Spence, Jim Chang | 2002-12-24 |
| 6356618 | Extreme-UV electrical discharge source | Richard E. Nygren, Michael A. Ulrickson | 2002-03-12 |