Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6480074 | Method and system for wafer-level tuning of bulk acoustic wave resonators and filters by reducing thickness non-uniformity | Jyrki Kaitila, Juha Ellä | 2002-11-12 |
| 6462460 | Method and system for wafer-level tuning of bulk acoustic wave resonators and filters | Juha Ellä, Jyrki Kaitila | 2002-10-08 |
| 6456173 | Method and system for wafer-level tuning of bulk acoustic wave resonators and filters | Juha Ellä, Jyrki Kaitila | 2002-09-24 |
| 6441702 | Method and system for wafer-level tuning of bulk acoustic wave resonators and filters | Juha Ellä, Jyrki Kaitila | 2002-08-27 |
| 6407649 | Monolithic FBAR duplexer and method of making the same | Juha Ellä, Jyrki Kaitila | 2002-06-18 |