Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475291 | Method and apparatus for decomposition of silicon oxide layers for impurity analysis of silicon wafers | Steve I. Petvai, Leslie Jane Bohnenkamp | 2002-11-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475291 | Method and apparatus for decomposition of silicon oxide layers for impurity analysis of silicon wafers | Steve I. Petvai, Leslie Jane Bohnenkamp | 2002-11-05 |