Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6463874 | Apparatus for the simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor | Joachim Doehler, Timothy P. Ellison, Masatsugo Izu, Herbert C. Ovshinsky | 2002-10-15 |