Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488777 | Semiconductor vacuum deposition system and method having a reel-to-reel substrate cassette | Jeffrey Owen Heng | 2002-12-03 |
| 6427622 | Hot wire chemical vapor deposition method and apparatus using graphite hot rods | Scott W. Morrison, Jianping Xi | 2002-08-06 |