Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435956 | Wafer holder and polishing device | Shin Ohwada | 2002-08-20 |
| 6425809 | Polishing apparatus | — | 2002-07-30 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435956 | Wafer holder and polishing device | Shin Ohwada | 2002-08-20 |
| 6425809 | Polishing apparatus | — | 2002-07-30 |